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Chemical vapour deposition of boron carbide from BBr3-CH4-H2 mixtures in a microwave plasma
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Published in: | Thin solid films 1990-07, Vol.188 (1), p.143-155 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(90)90200-W |