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Chemical vapour deposition of boron carbide from BBr3-CH4-H2 mixtures in a microwave plasma

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Bibliographic Details
Published in:Thin solid films 1990-07, Vol.188 (1), p.143-155
Main Authors: CHOLET, V, HERBIN, R, VANDENBULCKE, L
Format: Article
Language:English
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(90)90200-W