Solution precursor chemical vapor deposition of titanium oxide thin films

Saved in:
Bibliographic Details
Published in:Thin solid films 1991-09, Vol.204 (1), p.L13-L17
Main Authors: Lu, Jiong-Ping, Wang, Jenqdaw, Raj, Rishi
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Mechanical and acoustical properties of condensed matter
Mechanical and elastic waves, vibrations
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(91)90488-J