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Epitaxial growth of monoclinic and cubic ZrO2 on Si(100) without prior removal of the native SiO2

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Bibliographic Details
Published in:	Thin solid films 1992-09, Vol.217 (1-2), p.125-128
Main Authors:	LUBIG, A, BUCHAL, C, GUGGI, D, JIA, C. L, STRITZKER, B
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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