Structure of plasma-deposited ZrO2-Y2O3 ceramic layers

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Bibliographic Details
Published in:Thin solid films 1993-09, Vol.232 (2), p.161-168
Main Authors: CHEN, H. C, LIU, Z. Y, CHUANG, Y. C, XU, L. K
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(93)90004-9