Crystal growth and microstructure of polycrystalline Ti1-xAlxN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering

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Bibliographic Details
Published in:Thin solid films 1993-11, Vol.235 (1-2), p.62-70
Main Authors: WAHLSTRÖM, U, HULTMAN, L, SUNDGREN, J.-E, ADIBI, F, PETROV, I, GREENE, J. E
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(93)90244-j