Microstructure and residual stress of very thin Mo films

Very thin sputtered Mo films ( thicknesses

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Bibliographic Details
Published in:Thin solid films 1995-09, Vol.266 (1), p.52-57
Main Authors: Adams, D.P., Parfitt, L.J., Bilello, J.C., Yalisove, S.M., Rek, Z.U.
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Microstructure
Physics
Residual stress
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Description
Summary:Very thin sputtered Mo films ( thicknesses
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(95)00603-6