Atomic force microscopy and permeability study of stretching-induced gas barrier loss of AlOx layers

Gas permeation through oxygen-rich and metal-rich AlOx layers deposited onto polyethylene terephthalate film has been studied as a function of uniaxial stretching, by quadrupole mass spectrometry. The breakdown in the gas barrier is compared with microstructural changes taking place at the surface,...

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Bibliographic Details
Published in:Thin solid films 1995-04, Vol.259 (1), p.46-52
Main Authors: Barker, C.P., Kochem, K.-H., Revell, K.M., Kelly, R.S.A., Badyal, J.P.S.
Format: Article
Language:English
Subjects:
Aluminium oxide
Atomic force microscopy
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Other nonelectronic physical properties
Physical properties of thin films, nonelectronic
Physics
Polymers
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:Gas permeation through oxygen-rich and metal-rich AlOx layers deposited onto polyethylene terephthalate film has been studied as a function of uniaxial stretching, by quadrupole mass spectrometry. The breakdown in the gas barrier is compared with microstructural changes taking place at the surface, using atomic force microscopy.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(95)80054-9