Thin-film techniques applied to silicon microwave devices

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Bibliographic Details
Published in:Vacuum 1965-09, Vol.15 (9), p.465-465
Main Authors: Shurmer, H.V., Tole, J.A., Associated Electrical Industries Limited
Format: Article
Language:English
Online Access:Get full text
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ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(65)92144-5