The interpretation of mass spectra in vacuum measurement

The production of mass spectra is described, together with the application of cracking pattern spectra to the analysis of gas mixtures. The design requirements of a mass spectrometer suitable for residual vacuum analysis are discussed, operational inaccuracies and errors being detailed. For the AEI...

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Bibliographic Details
Published in:Vacuum 1966-01, Vol.16 (2), p.67-73
Main Authors: D Craig, R, H Harden, E
Format: Article
Language:English
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Summary:The production of mass spectra is described, together with the application of cracking pattern spectra to the analysis of gas mixtures. The design requirements of a mass spectrometer suitable for residual vacuum analysis are discussed, operational inaccuracies and errors being detailed. For the AEI MS10 reproducibilities of cracking pattern spectra and partial pressure data can be relied on to ± 2 per cent; linearity with pressure to better than 1 per cent. Calibration methods are outlined and results from practical applications to residual spectra are given.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(66)90492-1