Quantitative measurements with quadrupole mass spectrometers: important specifications for reliable measurements

In recent years, the quadrupole sensor has increasingly been used in new applications far away from vacuum technology, often with the demand for quantitative results. The use of simple, low-cost RGA's for quantitative measurements often yields disappointing results which spoil the reputation of...

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Bibliographic Details
Published in:Vacuum 1988, Vol.38 (2), p.103-109
Main Author: Bley, Werner Große
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mass spectrometers and related techniques
Physics
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Summary:In recent years, the quadrupole sensor has increasingly been used in new applications far away from vacuum technology, often with the demand for quantitative results. The use of simple, low-cost RGA's for quantitative measurements often yields disappointing results which spoil the reputation of the principle as a quantitative method. Typical classes of quantitative measurements will be listed and correlated with typical specifications of the quadrupole. It will be shown that many practically important quantitative measurements only require a stable instrument. For quantitative analysis of mixtures with strongly varying components a good linearity is additionally required. As a practical example for the quadrupole as a process gas analyser the PGA 100 from Leybold-Heraeus will be taken. It will be shown that, paying attention to its limits, even a small quadrupole instrument can have the stability and linearity required for reliable quantitative measurements.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(88)90606-9