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Formation of GaP1−xNx alloys by double ion implantation

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Bibliographic Details
Published in:Vacuum 1989-01, Vol.39 (2-4), p.215-216
Main Authors: Zhenjin, Lin, Liu, Wu, Xizhen, Yang, Yuliang, Liu, Shirun, Wang, Xitian, Liu, Guiying, Li
Format: Article
Language:English
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ISSN:0042-207X
DOI:10.1016/0042-207X(89)90200-5