A preliminary attempt at the calibration of a small quadrupole mass spectrometer in the ultra-high vacuum portion of its range

This paper presents experimental results concerning the accuracy of a typical small commercial quadrupole mass spectrometer when it is used to measure absolute partial pressures of the gases normally encountered as residuals in metal ultra-high vacuum systems.

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Bibliographic Details
Published in:Vacuum 1990, Vol.40 (3), p.309-312
Main Authors: Sankey, JD, Bass, AH
Format: Article
Language:English
Subjects:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Optical elements, devices, and systems
Optics
Physics
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Description
Summary:This paper presents experimental results concerning the accuracy of a typical small commercial quadrupole mass spectrometer when it is used to measure absolute partial pressures of the gases normally encountered as residuals in metal ultra-high vacuum systems.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(90)90049-5