Effect of local layer thickness deviations on multilayer diffraction

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Bibliographic Details
Published in:Vacuum 1991, Vol.42 (16), p.1047-1047
Main Authors: Gou, SP, He, X, Wu, ZQ, Redko, SV
Format: Article
Language:English
Online Access:Get full text
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ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(91)91288-Y