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Investigation of titanium nitride films prepared by Xe+ ion beam enhanced deposition in a N2 gas environment
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Published in: | Vacuum 1991, Vol.42 (16), p.1089 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0042-207X |
DOI: | 10.1016/0042-207X(91)91448-W |