A reliable compact ultra-high vacuum scanning tunneling microscope

A new ultrahigh vacuum (uhv) scanning tunneling microscope (STM) with exchangeable samples and tips is constructed which is compatible with typical surface science techniques. The STM incorporates a number of novel features, including an optimized inner vibration isolation system. A tip-to-sample ap...

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Bibliographic Details
Published in:Vacuum 1995-03, Vol.46 (3), p.219-222
Main Authors: Lyubinetsky, IV, Mel'nik, PV, Nakhodkin, NG, Anisimov, AE
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning probe microscopes, components and techniques
Scanning tunneling microscopes
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Summary:A new ultrahigh vacuum (uhv) scanning tunneling microscope (STM) with exchangeable samples and tips is constructed which is compatible with typical surface science techniques. The STM incorporates a number of novel features, including an optimized inner vibration isolation system. A tip-to-sample approach is performed by means of a simple, reliable all-mechanical system with only two parts moving in vacuum. The tip is scanned using a monolithic piezoelectric element. A compact design allowed to place the entire STM assembly on a single 150 mm outer diameter uhv flange. The STM has been placed on a side flange of the uhv chamber equipped with electron spectroscopy technique and sample/tip cleaning and preparation facilities. The performance of the STM is illustrated with images of Si(111) surface.
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(94)00047-6