Chemical and structural order in silicon oxynitrides by methods of surface physics

A large number of thin amorphous layers of SiO xN y and several (crystalline) reference compounds (SiO 2, Si 3N 4, Si 2N 2O) are studied. Although XANES and SEXAFS are well sulted to derive structural and chemical order, for these compounds many problems remain to be solved. We show how core level s...

Full description

Saved in:
Bibliographic Details
Published in:Progress in surface science 1990, Vol.35 (1), p.179-184
Main Authors: Finster, J., Heeg, J., Klinkenberg, E.-D.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A large number of thin amorphous layers of SiO xN y and several (crystalline) reference compounds (SiO 2, Si 3N 4, Si 2N 2O) are studied. Although XANES and SEXAFS are well sulted to derive structural and chemical order, for these compounds many problems remain to be solved. We show how core level spectra (XPS, AES) can be used to gain such information (e.g. random bonding structure, N coordination, oxidation behaviour).
ISSN:0079-6816
1878-4240
DOI:10.1016/0079-6816(90)90038-L