Mass spectrometric investigation of the thermal decomposition of various organosilicon compounds in SixC1-x(H) chemical vapour deposition

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Bibliographic Details
Published in:Journal of analytical and applied pyrolysis 1982-06, Vol.4 (1), p.59-72
Main Authors: Gerault, J.P., Morancho, R., Constant, G., Mazerolles, P., Manuel, G.
Format: Article
Language:English
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ISSN:0165-2370
DOI:10.1016/0165-2370(82)80027-2