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A mass spectrometry study of the gas pyrolysis of PH3 and a PH3/Si2H6 mixture

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Bibliographic Details
Published in:Journal of analytical and applied pyrolysis 1993-07, Vol.26 (1), p.27-36
Main Authors: SIMON, J, FEURER, R, REYNES, A, MORANCHO, R
Format: Article
Language:English
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ISSN:0165-2370
1873-250X
DOI:10.1016/0165-2370(93)85016-R