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A mass spectrometry study of the gas pyrolysis of PH3 and a PH3/Si2H6 mixture
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Published in: | Journal of analytical and applied pyrolysis 1993-07, Vol.26 (1), p.27-36 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0165-2370 1873-250X |
DOI: | 10.1016/0165-2370(93)85016-R |