Microlithography on complex-shaped surface

A combination of lithography process and kinematical object drive system is proposed for complex-shaped surface patterning. Desired picture with high optical contrast was obtained on small diameter beryllium sphere by UV-lithography. Repetition rate nitrogen laser and UV-resist AZ-1350H were used. P...

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Bibliographic Details
Published in:Microelectronic engineering 1992-03, Vol.17 (1), p.117-120
Main Authors: Geondzhian, Yu.G., Korol, V.Yu, Kuznecov, V.Ya, Sorokin, V.V., Vragov, K.M.
Format: Article
Language:English
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Summary:A combination of lithography process and kinematical object drive system is proposed for complex-shaped surface patterning. Desired picture with high optical contrast was obtained on small diameter beryllium sphere by UV-lithography. Repetition rate nitrogen laser and UV-resist AZ-1350H were used. Picture line width nonuniformity corresponds to few micrometers.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(92)90024-L