Experimental Examination of Strained Semiconductor Samples using photoacoustic diagnostic method

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Bibliographic Details
Published in:Microelectronic engineering 1994-08, Vol.25 (2), p.241-245
Main Authors: Tsyganok, B.A., Krivokon, I.A., Belyaev, A.D.
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(94)90022-1