Procedure of microwave investigations of ferroelectric films and tunable microwave devices based on ferroelectric films

Measuring devices and main expressions for the procedure of measurements of the dielectric properties of ferroelectric (FE) films at microwave (MW) are presented. The results of MW measurements of SrTiO 3 (STO) and Ba 0.5Sr 0.5TiO 3 (BSTO) films demonstrate the possibilities of this procedure. Formu...

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Bibliographic Details
Published in:Microelectronic engineering 1995-12, Vol.29 (1), p.257-260
Main Authors: Kozyrev, A.B., Keis, V.N., Koepf, G., Yandrofski, R., Soldatenkov, O.I., Dudin, K.A., Dovgan, D.P.
Format: Article
Language:English
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Summary:Measuring devices and main expressions for the procedure of measurements of the dielectric properties of ferroelectric (FE) films at microwave (MW) are presented. The results of MW measurements of SrTiO 3 (STO) and Ba 0.5Sr 0.5TiO 3 (BSTO) films demonstrate the possibilities of this procedure. Formulas required to choose the most suitable FE materials and to design the FE microwave devices (filters, phase shifters) are presented.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(95)00156-5