Transmission electron microscopy of epitaxial SrTiO3 films on LaAlO3 substrates

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Bibliographic Details
Published in:Microelectronic engineering 1995-12, Vol.29 (1-4), p.309-312
Main Authors: RYEN, L, OLSSON, E, MADSEN, L. D, JOHNSON, C. N, WANG, X, JACOBSEN, S. N, HELMERSSON, U, RUDNER, S, WERNLUND, L.-D
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(95)00167-0