Template patterning of YBa2Cu3O7

We demonstrate the use of thin chromium layers to define structures in YBa2Cu3O7 deposited by laser ablation. The chromium reacts with copper to form an insulating crystalline compound containing copper and chromium in equal amounts. Although the reaction will proceed up to approximately 1 μm into t...

Full description

Saved in:
Bibliographic Details
Published in:Microelectronic engineering 1996-01, Vol.30 (1-4), p.369-372
Main Authors: van der Harg, A.J.M., Rousseeuw, B.A.C., van der Drift, E.
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We demonstrate the use of thin chromium layers to define structures in YBa2Cu3O7 deposited by laser ablation. The chromium reacts with copper to form an insulating crystalline compound containing copper and chromium in equal amounts. Although the reaction will proceed up to approximately 1 μm into the defined pattern, the formation of a crystalline compound means that the extent of the reaction is limited by the availability of chromium. We have defined large-area, regular grids of tiny chromium pads, yielding a grid of insulating islands of approximately 600 nm in size after YBa2Cu3O7 deposition. Electrical measurements show the influence of such a pattern on the R-T characteristics of the YBa2Cu3O7.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(95)00266-9