Wide-range scanning and lens correction of an ion microprobe

The expected performance of a wide range scanning unit designed for an ion microprobe using a superconducting solenoid lens is investigated. Since the resulting spot size is mainly limited by chromatic aberration, the scanning unit should be installed close to the center of the solenoid lens to achi...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1995-09, Vol.104 (1), p.77-80
Main Authors: Meijer, J., Stephan, A., Bukow, H.H., Rolfs, C., Bruhn, F.
Format: Article
Language:English
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Summary:The expected performance of a wide range scanning unit designed for an ion microprobe using a superconducting solenoid lens is investigated. Since the resulting spot size is mainly limited by chromatic aberration, the scanning unit should be installed close to the center of the solenoid lens to achieve optimal ion optical properties. Furthermore, the deflection system should consist of two independent controllable multipole units that correct an axial astigmatism introduced by a residual asymmetry of the solenoid lens.
ISSN:0168-583X
1872-9584
DOI:10.1016/0168-583X(95)00412-2