Alfa-particle irradiation induced defects in SiO2 films of SiSiO2 structures

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1996-08, Vol.116 (1-4), p.389-392
Main Authors: Koman, B.P., Gal'chynskyy, O.V., Kovalyuk, R.O., Shkol'nyy, A.K.
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/0168-583X(96)00076-6