Composition analysis of ECR-grown SiO2 and SiOxFy films

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1996-09, Vol.118 (1-4), p.698-703
Main Authors: Burkhart, J.H., Denison, D., Barbour, J.C., Apblett, C.A.
Format: Article
Language:English
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ISSN:0168-583X
DOI:10.1016/0168-583X(96)00255-8