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A high resolution magnetic spectrograph for ion beam analysis
A magnetic spectrograph especially designed for interface and thin film analysis has been installed at the 6.5 MV tandem accelerator of the University of Utrecht. It is provided with a Wien filter, so that both the mass and the charge of the ions arriving in the focal plane is determined. In the foc...
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Published in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 1996-09, Vol.118 (1), p.566-572 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A magnetic spectrograph especially designed for interface and thin film analysis has been installed at the 6.5 MV tandem accelerator of the University of Utrecht. It is provided with a Wien filter, so that both the mass and the charge of the ions arriving in the focal plane is determined. In the focal plane a two-dimensional position-sensitive detector is used to obtain spectra with resolved energy along one axis, and resolved angles (perpendicular to the scattering plane) along the other axis. A special bellows construction allows the spectrograph to be rotated over an angular range of 120° while maintaining the ultra-high vacuum conditions. The first results of RBS and ERD measurements are presented. |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/0168-583X(96)00259-5 |