Synchrotron radiation soft X-ray reflectometer and its physics results

A new home-made reflectometer has been installed at Beamline 3B1 of the Beijing Synchrotron Radiation Facility (BSRF). It uses synchrotron radiation as the light source and a multilayer mirror as the monochromator. With this system, the transmission spectrum of an Al film and the soft X-ray reflecti...

Full description

Saved in:
Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 1995-05, Vol.359 (1), p.151-154
Main Authors: Mingqi, Cui, Jianwei, Miao, Jun, Wang, Yuying, Huang, Esheng, Tang, Jinghong, Shao, Song, Xue, Zhengliang, Xu, Jianhui, Sun
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new home-made reflectometer has been installed at Beamline 3B1 of the Beijing Synchrotron Radiation Facility (BSRF). It uses synchrotron radiation as the light source and a multilayer mirror as the monochromator. With this system, the transmission spectrum of an Al film and the soft X-ray reflection spectrum of a Nb Si multilayer mirror are obtained. The soft X-ray reflectivity up to 32% of the Nb Si multilayer mirror (41 layers, periodic thickness 13.45 nm and wavelength 17.59 nm) is obtained.
ISSN:0168-9002
1872-9576
DOI:10.1016/0168-9002(94)01683-6