Loading…

Methods for quantitative electron probe microanalysis of small particles and thin films

The application of the electron probe microanalyzer to quantitative determination of the thickness and composition of thin films and the composition of small particles is described. The key element in these applications has been the development of accurate predictive models for the depth distributio...

Full description

Saved in:
Bibliographic Details
Published in:Applied Surface Science 1986-09, Vol.26 (3), p.294-305
Main Authors: Brown, J.D., Packwood, R.H.
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The application of the electron probe microanalyzer to quantitative determination of the thickness and composition of thin films and the composition of small particles is described. The key element in these applications has been the development of accurate predictive models for the depth distribution of X-ray production (θ(ϱ z) curves). The sensitivity for most elements in the periodic table is less than one monolayer based on modest electron beam currents and analysis times. By measuring intensities as a function of electron energies, the determination of concentration gradients is also possible.
ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(86)90070-X