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Methods for quantitative electron probe microanalysis of small particles and thin films
The application of the electron probe microanalyzer to quantitative determination of the thickness and composition of thin films and the composition of small particles is described. The key element in these applications has been the development of accurate predictive models for the depth distributio...
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Published in: | Applied Surface Science 1986-09, Vol.26 (3), p.294-305 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The application of the electron probe microanalyzer to quantitative determination of the thickness and composition of thin films and the composition of small particles is described. The key element in these applications has been the development of accurate predictive models for the depth distribution of X-ray production (θ(ϱ
z) curves). The sensitivity for most elements in the periodic table is less than one monolayer based on modest electron beam currents and analysis times. By measuring intensities as a function of electron energies, the determination of concentration gradients is also possible. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/0169-4332(86)90070-X |