Thermal nitridation of silicon dioxide at atmospheric pressure

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Bibliographic Details
Published in:Applied surface science 1989-11, Vol.40 (1-2), p.65-76
Main Authors: Chartier, J.L., Plantard, M., Serrari, A., Le Bihan, R., Rigo, S., Ledys, J.L.
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/0169-4332(89)90160-8