Passivation of GaInAs pin photodiodes by UVCVD SiNx

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Bibliographic Details
Published in:Applied surface science 1989-10, Vol.39 (1-4), p.168-177
Main Authors: Le Bellego, Y., Renaud, J.C., Blanconnier, P., Praseuth, J.P.
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/0169-4332(89)90431-5