A high throughput blanket tungsten process based on H2/WF6 chemistry

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Bibliographic Details
Published in:Applied surface science 1989-09, Vol.38 (1-4), p.350-358
Main Authors: Schmitz, J.E.J., Van Dijk, A.J.M., Suijker, J.L.G., Buiting, M.J., Ellwanger, R.C.
Format: Article
Language:English
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ISSN:0169-4332
DOI:10.1016/0169-4332(89)90555-2