Excimer laser ablation of polyimide

The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Posi...

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Bibliographic Details
Published in:Applied surface science 1990-12, Vol.46 (1), p.272-278
Main Authors: Ulmer, G., Hasselberger, B., Busmann, H.-G., Campbell, E.E.B.
Format: Article
Language:English
Subjects:
Applied sciences
Chemical reactions and properties
Exact sciences and technology
Organic polymers
Physicochemistry of polymers
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Summary:The velocity and angular distributions of the positively charged, negatively charged and neutral products from 308 nm laser ablation of polyimide have been investigated. The differences in the distributions for the three kinds of products can be attributed to the different formation mechanisms. Positive ions are formed in the centre of the laser focus and are ejected with a cos 4θ distribution about the surface normal. Neutral and negatively charged products show a cos θ angular distribution. All products are ejected with supersonic velocities with v positive> v negative> v neutral for a given laser fluence.
ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(90)90155-S