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The growth of ultra-thin amorphous WGex films on Si by the GeH4 reduction of WF6

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Bibliographic Details
Published in:	Applied surface science 1991-11, Vol.53, p.47-53
Main Authors:	LEUSINK, G. J, OOSTERLAKEN, T. G. M, VAN DER JEUGD, C. A, JANSSEN, G. C. A. M, RADELAAR, S
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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