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Electrical resistivity of RuOx thin films prepared by ion beam sputter deposition

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Bibliographic Details
Published in:	Applied surface science 1993-03, Vol.65-66, p.293-297
Main Authors:	KEZUKA, H, EGERTON, R, MASUI, M, WADA, T, IKEHATA, T, MASE, H, TAKEUCHI, M
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology Physics
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