Semiconductor gas sensors

The various ways that gaseous species can affect the resistance of a semiconductor are discussed, with particular emphasis on those where the effect is reversible and, hence, suitable for gas sensing. These latter include reduction/oxidation of the semiconductor, anion exchange with the semiconducto...

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Bibliographic Details
Published in:Sensors and actuators 1982-01, Vol.2, p.329-341
Main Author: Morrison, S.Roy
Format: Article
Language:English
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Summary:The various ways that gaseous species can affect the resistance of a semiconductor are discussed, with particular emphasis on those where the effect is reversible and, hence, suitable for gas sensing. These latter include reduction/oxidation of the semiconductor, anion exchange with the semiconductor, adsorption directly on the semiconductor and adsorption by reaction with a surface state. The requirements on the semiconductor are discussed, and it is concluded that oxide semiconductors are usually required. Means to increase the sensitivity and specificity of the gas sensor are discussed, including the form of the semiconductor, catalysts and intentionally added surface states.
ISSN:0250-6874
DOI:10.1016/0250-6874(81)80054-6