Crystallization and microstructure study of radio frequency magnetron sputtered PbTiO3 films on silicon

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Bibliographic Details
Published in:Materials chemistry and physics 1994-01, Vol.36 (3-4), p.337-342
Main Authors: Wu, T.B., Hong, T.J., Jiang, M.C.
Format: Article
Language:English
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ISSN:0254-0584
DOI:10.1016/0254-0584(94)90051-5