Production of dielectric and semiconducting diamond-like films

The paper deals with the results of diamond-film production when a hydrocarbon-containing gas mixture is excited by a glow discharge. The Raman spectra and electrical conductivity of films deposited under various conditions have been studied. The specific resistance of the films varied from 10 -2 to...

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Bibliographic Details
Published in:Surface & coatings technology 1992-02, Vol.50 (3), p.205-207
Main Authors: Andreyev, V.D., Semenovich, V.A., Torishniy, V.I.
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:The paper deals with the results of diamond-film production when a hydrocarbon-containing gas mixture is excited by a glow discharge. The Raman spectra and electrical conductivity of films deposited under various conditions have been studied. The specific resistance of the films varied from 10 -2 to 10 8 ω cm depending on the test conditions.
ISSN:0257-8972
1879-3347
DOI:10.1016/0257-8972(92)90002-R