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Optical properties and axial aberration coefficients of the cathode lens in combination with a focusing lens

The analytical expression of the axial aberration coefficients of the cathode lens in combination with a focusing lens was derived and the values compared with those when only a cathode lens is used. For the real arrangement of the cathode lens in combination with a magnetic focusing single-polepiec...

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Bibliographic Details
Published in:Ultramicroscopy 1992, Vol.45 (1), p.159-162
Main Authors: Lenc, M., Müllerová, I.
Format: Article
Language:English
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Summary:The analytical expression of the axial aberration coefficients of the cathode lens in combination with a focusing lens was derived and the values compared with those when only a cathode lens is used. For the real arrangement of the cathode lens in combination with a magnetic focusing single-polepiece lens the radius of the aberration disc is 7 nm for an electron energy of 10 eV and for an immersion ratio of 1000.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(92)90047-N