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Optical properties and axial aberration coefficients of the cathode lens in combination with a focusing lens
The analytical expression of the axial aberration coefficients of the cathode lens in combination with a focusing lens was derived and the values compared with those when only a cathode lens is used. For the real arrangement of the cathode lens in combination with a magnetic focusing single-polepiec...
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Published in: | Ultramicroscopy 1992, Vol.45 (1), p.159-162 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The analytical expression of the axial aberration coefficients of the cathode lens in combination with a focusing lens was derived and the values compared with those when only a cathode lens is used. For the real arrangement of the cathode lens in combination with a magnetic focusing single-polepiece lens the radius of the aberration disc is 7 nm for an electron energy of 10 eV and for an immersion ratio of 1000. |
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ISSN: | 0304-3991 1879-2723 |
DOI: | 10.1016/0304-3991(92)90047-N |