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A scanning tunneling microscope combined with an atomic force microscope as an option for surface studies in air at room temperature is described. The device characteristics (AFM and STM) are: normal resolution ≤ 0.01 nm, thermal drift ≤ 1 nm/h, overall measurement time per one pixel ≥ 0.3 ms. The a...

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Bibliographic Details
Published in:Ultramicroscopy 1992-07, Vol.42 (B), p.1596-1601
Main Authors: Moiseev, Yu.N., Panov, V.I., Savinov, S.V., Vasil'ev, S.I., Yaminsky, I.V.
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:A scanning tunneling microscope combined with an atomic force microscope as an option for surface studies in air at room temperature is described. The device characteristics (AFM and STM) are: normal resolution ≤ 0.01 nm, thermal drift ≤ 1 nm/h, overall measurement time per one pixel ≥ 0.3 ms. The application of graphite structures for subnanometer metrology is discussed. A friction mode is implemented in the AEM for contrasting atomically resolved images. Different materials (quartz substrates, diamond-like thin films, Langmuir-Blodgett films) with unique atomic flatness appropriate for nanotechnological purposes are investigated.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(92)90490-B