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Au-Si diffusion size effect
Using the dissociative model, diffusion of Au atoms into Si plate has been investigated for temperatures below 1270 K. It is shown that, as the plate thickness decreases, the interstitial regime can change into the vacancy regime of diffusion transfer.
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Published in: | Physics letters. A 1990-06, Vol.146 (7), p.421-425 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Using the dissociative model, diffusion of Au atoms into Si plate has been investigated for temperatures below 1270 K. It is shown that, as the plate thickness decreases, the interstitial regime can change into the vacancy regime of diffusion transfer. |
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ISSN: | 0375-9601 1873-2429 |
DOI: | 10.1016/0375-9601(90)90722-Z |