Interactions simultanees du chlore et de l'oxygene sous basse pression, avec le tantale a haute temperature

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Bibliographic Details
Published in:Applications of surface science 1980-05, Vol.5 (1), p.21-27
Main Authors: Caradec, J.Y., Philippart, J.L., Weber, B., Cassuto, A.
Format: Article
Language:fre
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ISSN:0378-5963
DOI:10.1016/0378-5963(80)90114-2