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AES and RBS analysis of laser mixed Cr and Ni multilayer films on Cu alloys

The chemical analysis of Cr and Ni multilayer films laser mixed with Cu alloy substrates has been carried out with Auger electron and Rutherford backscattering spectroscopies. For multilayer transition metal on metal systems, such as Cu/Cr/Ni, the complementary use of both AES and RBS results in a m...

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Bibliographic Details
Published in:Applications of surface science 1984, Vol.18 (1), p.86-105
Main Authors: Sawchyn, I., Draper, C.W.
Format: Article
Language:English
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Summary:The chemical analysis of Cr and Ni multilayer films laser mixed with Cu alloy substrates has been carried out with Auger electron and Rutherford backscattering spectroscopies. For multilayer transition metal on metal systems, such as Cu/Cr/Ni, the complementary use of both AES and RBS results in a more detailed understanding of the laser mixed compositional profiles than would result from the application of either technique alone. The relative strengths and weaknesses of both analytical methods are pointed out.
ISSN:0378-5963
DOI:10.1016/0378-5963(84)90039-4