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A relaxation method for determining state of equilibrium and tempera- ture ratio Te/ Tg in an argon ICPT
A relaxation method is developed which provides a sensitive means of investigating the state of equilibrium and which measures directly the temperature ratio T e/ T g, between the electrons and atomic species in an ICPT or other low temperature argon plasma. The method uses measurements of the time...
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Published in: | Spectrochimica acta. Part B: Atomic spectroscopy 1988, Vol.43 (6), p.819-829 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A relaxation method is developed which provides a sensitive means of investigating the state of equilibrium and which measures directly the temperature ratio
T
e/
T
g, between the electrons and atomic species in an ICPT or other low temperature argon plasma. The method uses measurements of the time dependent intensities of the optically-thin argon I spectral lines immediately after removal of the plasma sustaining energy source (the rf field in the case of the ICPT). Since the intensity of the same spectral line is compared before and after the rf field switch off, which takes ≈ 3 μs, with the same plasma and the same optical system, the relaxation method is very accurate, requiring no independently measured or calculated spectroscopic parameters. Experimental results are given confirming the validity of the method for investigating the plasma and its non-equilibrium state in the argon ICPT. |
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ISSN: | 0584-8547 1873-3565 |
DOI: | 10.1016/0584-8547(88)80115-0 |