Glancing angle EXAFS investigations of the effects of annealing on W-C multilayer composition

The problem of thermal instability of W-C multilayers is addressed. EXAFS above the tungsten L3 edge was measured before and after mild annealing treatment of different samples. High reflectivity is maintained, yet the structural environment of the tungsten can be dramatically altered. There is exte...

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 1989-06, Vol.158 (1-3), p.672-673
Main Authors: Lamble, G.M., Heald, S.M., Sayers, D.E., Ziegler, E., Viccaro, P.J.
Format: Article
Language:English
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Summary:The problem of thermal instability of W-C multilayers is addressed. EXAFS above the tungsten L3 edge was measured before and after mild annealing treatment of different samples. High reflectivity is maintained, yet the structural environment of the tungsten can be dramatically altered. There is extensive formation of W2C depending on the absolute tungsten thickness and the W/C thickness ratio.
ISSN:0921-4526
1873-2135
DOI:10.1016/0921-4526(89)90434-1