Shape and correlation of oxygen precipitates in silicon

SANS anisotropies from SiO 2 precipitates in Cz-silicon depend on the initial oxygen content and temperature. There is a particle-shape governed central peak and numerous weak intensities for larger Q-values. They originate from a correlation between the precipitates and disappear reversibly at temp...

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 1992-06, Vol.180, p.512-514
Main Authors: Sieger, D., Tietze-Jaensch, H., Geick, R., Zulehner, W., de Geyer, A.
Format: Article
Language:English
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Summary:SANS anisotropies from SiO 2 precipitates in Cz-silicon depend on the initial oxygen content and temperature. There is a particle-shape governed central peak and numerous weak intensities for larger Q-values. They originate from a correlation between the precipitates and disappear reversibly at temperatures below 100K. Model calculations do well resemble the observed intensity patterns.
ISSN:0921-4526
DOI:10.1016/0921-4526(92)90808-6