Preparation and properties of Bi(Pb)-Sr-Ca-Cu-O films above 100 K by RF magnetron sputtering

Fabrication of Bi(Pb)-Sr-Ca-Cu-O thin films above 100 K by RF magnetron sputtering using a target containing Pb is reported. The superconducting and material properties of films under various sputtering and annealing conditions are studied. Thin films deposited at 700°C and annealed at 886°C in air...

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Bibliographic Details
Published in:Physica. C, Superconductivity Superconductivity, 1988-12, Vol.156 (5), p.817-821
Main Authors: Wen, Zhongmin, Kanke, Yoko, Iguchi, Ienari
Format: Article
Language:English
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Summary:Fabrication of Bi(Pb)-Sr-Ca-Cu-O thin films above 100 K by RF magnetron sputtering using a target containing Pb is reported. The superconducting and material properties of films under various sputtering and annealing conditions are studied. Thin films deposited at 700°C and annealed at 886°C in air exhibit a zero-resistivity temperature of 104 K. Dependence of high- T c phase growth on substrate temperature and annealing temperature is also presented.
ISSN:0921-4534
1873-2143
DOI:10.1016/0921-4534(88)90167-0