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Titanium implantation into a high speed steel: Distribution parameters and CEMS characterization
The AISI M2 high speed steel was implanted with 110 keV titanium ions at 20°C and with fluences varying between 5 × 10 16 and 4 × 10 17 Ti + cm −2. For each fluence, theoretical distributions were calculated taking into account the variation of both the titanium concentration as a function of depth...
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Published in: | Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 1989-08, Vol.115, p.37-42 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The AISI M2 high speed steel was implanted with 110 keV titanium ions at 20°C and with fluences varying between 5 × 10
16 and 4 × 10
17 Ti
+ cm
−2. For each fluence, theoretical distributions were calculated taking into account the variation of both the titanium concentration as a function of depth and the distribution parameters (R
p
,
ΔR
p
, skewness, kurtosis, sputtering yield). A comparison was made between these results and experimental ones. More precisely, it concerns the titanium profiling using the
48Ti(p, γ)
49V resonant nuclear reaction at 1362 keV and the sputtering yield measurements of iron. Moreover, carbon and oxygen contaminations were followed at room temperature and 180 °C as a function of fluence by backscattering spectroscopy at high energy. Characterization of the phases produced was performed using conversion electron Mössbauer spectroscopy. The results were correlated in order to propose a general arrangement of the phases inside the implanted layer. |
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ISSN: | 0921-5093 1873-4936 |
DOI: | 10.1016/0921-5093(89)90653-9 |