Synthesis of oxides in Si0.5Ge0.5 alloy by high dose oxygen ion implantation

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 1992-01, Vol.12 (1-2), p.199-203
Main Authors: Castle, J.E., Liu, H.D., Watts, J.F., Hemment, P.L.F., Zhang, J.P., Newstead, S.M., Powell, A.R., Whall, T.E., Parker, E.H.C.
Format: Article
Language:English
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ISSN:0921-5107
DOI:10.1016/0921-5107(92)90286-I