Integrated thermopile sensors

This paper is about integrated silicon thermopiles and their applications in silicon sensors. After a short description of the thermoelectric effect and its use in silicon thermopiles, some attention is devoted to the design of micromachined structures for implementing thermal sensors. The various s...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 1990-06, Vol.22 (1-3), p.621-630
Main Authors: van Herwaarden, A.W., van Duyn, D.C., van Oudheusden, B.W., Sarro, P.M.
Format: Article
Language:English
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Summary:This paper is about integrated silicon thermopiles and their applications in silicon sensors. After a short description of the thermoelectric effect and its use in silicon thermopiles, some attention is devoted to the design of micromachined structures for implementing thermal sensors. The various sensing principles based on thermal effects are discussed next. Finally, an impression is given of some of the recently developed silicon-thermopile sensors which implement these sensing principles.
ISSN:0924-4247
1873-3069
DOI:10.1016/0924-4247(89)80046-9